DLC FILM DEPOSITION SYSTEM

PROBLEM TO BE SOLVED: To provide a DLC film deposition system where an almost uniform and homogeneous DLC film can be formed on the whole surface of a rolling element such as a steel ball with a simple constitution. SOLUTION: In a rotary shaft 41 in which one end part is connected with the output sh...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	YATSUKA MITSUYASU, FUJINAKA KENSAKU, MAEJIMA KATSUMI, FUJIWARA ETSUO
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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