DLC FILM DEPOSITION SYSTEM

PROBLEM TO BE SOLVED: To provide a DLC film deposition system where an almost uniform and homogeneous DLC film can be formed on the whole surface of a rolling element such as a steel ball with a simple constitution. SOLUTION: In a rotary shaft 41 in which one end part is connected with the output shaft of an electric motor, the other end part is connected with a stirring blade 31. Further, a mounting pan 21 having electric conductivity is supported so as to be suspended at the outside of a supporting tube 51 having electric conductivity and, in which the rotary shaft 41 is rotated at the inside. Each steel ball B mounted on the mounting pan 21 is rolled while being stirred by the stirring blade 31 rotating with the rotation of the rotary shaft 41, and, in this state, pulse-shaped negative voltage is applied to each steel ball B from a pulse power source 72 via the supporting tube 51 and the mounting pan 21, thus a DLC film is deposited on the whole surface of each steel ball B. COPYRIGHT: (C)2008,JPO&INPIT