MULTILAYER FILM COATING FOR QUASI-PHASE MATCHING ELEMENT

PROBLEM TO BE SOLVED: To solve such problems that in a process of depositing a multilayer film on the surface of a quasi-phase matching (QPM) element in which lithium tantalite (LiTaO3) or lithium niobate (LiNbO3) is used as a base material when green laser light at a wavelength of 532 nm is used, t...

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Bibliographische Detailangaben
1. Verfasser:	TATENO AKIRA
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING DIFFUSION TREATMENT OF METALLIC MATERIAL FREQUENCY-CHANGING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Zusammenfassung:	PROBLEM TO BE SOLVED: To solve such problems that in a process of depositing a multilayer film on the surface of a quasi-phase matching (QPM) element in which lithium tantalite (LiTaO3) or lithium niobate (LiNbO3) is used as a base material when green laser light at a wavelength of 532 nm is used, the configuration of the multilayer film itself is conventionally much examined, however, a relation between the multilayer film and the base material is not particularly considered. SOLUTION: In the multilayer coating of a QPM element having lithium metal oxide as a base material, an oxide of the metal constituting the above lithium metal oxide is used for a first layer in contact with the base material. Specifically, the first layer is made of tantalum pentoxide (Ta2O5) when the base material is lithium tantalite (LiTaO3), and the first layer is made of niobium trioxide (Nb2O3) when the base material is lithium niobate (LiNbO3). Thus, a QPM element with high performance can be obtained. COPYRIGHT: (C)2008,JPO&INPIT