PRESSURE SENSOR AND PROCESS OF MAKING PRESSURE SENSOR

PROBLEM TO BE SOLVED: To provide a pressure sensor which can improve durability to pressure media to be measured and which is small and cheap. SOLUTION: The pressure sensor includes a glass base 10', a diaphragm 26 displaced by pressure, and a silicon chip 20' on which a sensor circuit hav...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SUEMASU TATSUO, TAKIZAWA ISAO, YAMAMOTO SATOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS SEMICONDUCTOR DEVICES TESTING
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