PRESSURE SENSOR AND PROCESS OF MAKING PRESSURE SENSOR

PROBLEM TO BE SOLVED: To provide a pressure sensor which can improve durability to pressure media to be measured and which is small and cheap. SOLUTION: The pressure sensor includes a glass base 10', a diaphragm 26 displaced by pressure, and a silicon chip 20' on which a sensor circuit hav...

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Bibliographische Detailangaben
Hauptverfasser:	SUEMASU TATSUO, TAKIZAWA ISAO, YAMAMOTO SATOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER,MECHANICAL EFFICIENCY, OR FLUID PRESSURE PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a pressure sensor which can improve durability to pressure media to be measured and which is small and cheap. SOLUTION: The pressure sensor includes a glass base 10', a diaphragm 26 displaced by pressure, and a silicon chip 20' on which a sensor circuit having a piezoresistive element 22 which is provided on the diaphragm 26 and which varies the resistance value according to the displacement of the diaphragm 26 is formed, and which is joined to the glass base 10' so that the plane on which the sensor circuit is formed forms a space opposing to the glass base 10'. Besides, through holes 27 for deriving signals from the sensor circuit formed on the silicon chip 20' are formed in the silicon chip 20'. COPYRIGHT: (C)2008,JPO&INPIT