SYSTEM FOR MEASURING CHARACTERISTIC OF ELECTRONIC ELEMENT

SYSTEM FOR MEASURING CHARACTERISTIC OF ELECTRONIC ELEMENT

PROBLEM TO BE SOLVED: To provide a characteristic measuring system capable of materializing a reliable Kelvin connection irrespective of whether or not the contact states of measuring probes are good, no matter how much an electronic element such as a semiconductor chip is miniaturized. SOLUTION: Th...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: TAKESHIMA MASAAKI
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
DEVICES USING STIMULATED EMISSION
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
MEASURING
MEASURING ELECTRIC VARIABLES
MEASURING MAGNETIC VARIABLES
PHYSICS
SEMICONDUCTOR DEVICES
TESTING
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a characteristic measuring system capable of materializing a reliable Kelvin connection irrespective of whether or not the contact states of measuring probes are good, no matter how much an electronic element such as a semiconductor chip is miniaturized. SOLUTION: The characteristic measuring system MS is configured by performing Kelvin connection of two measuring probes to a semiconductor chip 3. The semiconductor chip 3 is arranged on conductive flat springs 2a-2d partitioned electrically into a plurality of portions, and its characteristic is measured in a state of being pressed by a combined probe PR. COPYRIGHT: (C)2008,JPO&INPIT