OXIME SULFONATE COMPOUND

PROBLEM TO BE SOLVED: To provide a novel compound useful as a monomer for a polymer compound utilizable as a component of a resist composition and a novel compound useful for manufacturing the compound. SOLUTION: The compound is represented by general formula (I) [wherein R1is a hydrogen atom or a m...

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Bibliographische Detailangaben
Hauptverfasser:	ABE KAZUTAKA, MOTOKI YOSHIAKI
Format:	Patent
Sprache:	eng
Schlagworte:	ACYCLIC OR CARBOCYCLIC COMPOUNDS CHEMISTRY COMPOSITIONS BASED THEREON MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS METALLURGY ORGANIC CHEMISTRY ORGANIC MACROMOLECULAR COMPOUNDS THEIR PREPARATION OR CHEMICAL WORKING-UP
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a novel compound useful as a monomer for a polymer compound utilizable as a component of a resist composition and a novel compound useful for manufacturing the compound. SOLUTION: The compound is represented by general formula (I) [wherein R1is a hydrogen atom or a methyl group; R2is a 1-5C straight-chain or branched-chain alkylene or fluorinated alkylene group; R3is an optionally substituted phenyl or naphthyl group; and R4is a 1-5C fluorinated alkyl group]. A compound represented by general formula (III-1), a compound represented by general formula (IV-1) and a compound represented by general formula (V-1) are also provided. COPYRIGHT: (C)2008,JPO&INPIT