DRAWING METHOD AND RECTANGULAR REGION DIVIDING METHOD IN ELECTRON BEAM DRAWING

PROBLEM TO BE SOLVED: To provide a drawing method and a rectangular region dividing method in electron beam drawing capable of preventing generation of a non-drawing portion and preventing occurrence of problems such as drawing irregularity or formation of stripes in the entire drawn image and degra...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	NAKADA NAOKO, NARUKAWA TERUSATO, TAKIGAWA TADAHIKO, ISHIKAWA MIKIO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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