METHOD FOR FORMING GRASPING SURFACE OF SAMPLE GRASPING MEMBER

PROBLEM TO BE SOLVED: To solve the problem wherein there is an attitude change and angular shift in a fine sample, caused by a leading end shape in the mechanism for grasping the fine sample, and the fine sample cannot be grasped in a desired attitude. SOLUTION: The grasping surface parallel to a charged particle beam such as FIB, or the like, can be formed by applying processing to a grasping member 18, and the dust adhered to the grasping surface is also removed. When the fine sample represented by a TEM sample is formed in the apparatus irradiated with the charged particle beam by the etching due to the charged particle beam to be transported, the sample is etched in the irradiation direction of the charged particle beam and the grasping surface 19 of the grasping member 18 can be processed in the same direction as that of the cross section processing of the sample; accordingly, the sample and the grasping surface 19 can be formed into parallel surfaces and the changes in the attitude of the sample, when the sample is grasped, can be reduced. COPYRIGHT: (C)2008,JPO&INPIT