VACUUM VALVE UNIT

PROBLEM TO BE SOLVED: To provide a vacuum valve unit 1 superior in work efficiency and in view of costs to a user, and to facilitate miniaturization and a designing of a vacuum device including the vacuum valve unit 1. SOLUTION: The vacuum valve unit is provided with: a housing 2 having a container connection port P1, a raw exhaust port P2, and a main exhaust port P3; a raw exhaust valve element 3 carrying out opening and closing of the raw exhaust port P2; a planar sealing type main exhaust valve element 4 carrying out opening and closing of the main exhaust port P3; a raw exhaust valve element operation part for operating movement of the raw exhaust valve element 3; and a main exhaust valve element operation part for operating movement of the main exhaust valve element 4. By operating the raw exhaust valve element operation part and the main exhaust valve element operation part, the raw exhaust valve element 3 and the main exhaust valve element 4 are moved from fully closed states to a raw exhaust state wherein the raw exhaust port P2 is opened and the main exhaust port P3 is closed, or to a main exhaust state wherein the raw exhaust port P2 is closed and the main exhaust port P3 is opened. COPYRIGHT: (C)2008,JPO&INPIT