MICROCHIP AND ITS MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide a microchip of quality, excellent efficiency and economical efficiency, which has highly integrated and laminated flow paths comprising finer grooves of optional planar pattern for achieving high and multiple functionality, and its manufacturing method. SOLUTION: Thi...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SUZUKI YASUSUKE, TOMITA SEIKI, SHINOHARA YASUHIRO, HASHIMOTO MASAKAZU, MATSUMURA TAKASHI
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a microchip of quality, excellent efficiency and economical efficiency, which has highly integrated and laminated flow paths comprising finer grooves of optional planar pattern for achieving high and multiple functionality, and its manufacturing method. SOLUTION: This microchip includes: a laminate 1 laminated and mutually joined with a plurality of substrates 2; an appropriate number of inflow ports 3, 4 and outflow port 5 formed in the substrate 2 of the laminate 1 so as to communicate with each other, and disposed at a predetermined position; and a closed sectional flow path 10 formed in mirror symmetry by mutually facing on the joint surface of the respective substrates 2, and constituted by abutting one side flow paths 10a, 10b connecting the inflow ports 3, 4 to the outflow port 5 and comprising fine grooves of the predetermined planar pattern by the joint of the respective substrates 2, wherein the laminate 1 is equipped with a positioning mechanism for performing a precise positioning of the one side flow paths 10a, 10b facing upon joining of the respective substrates 2. COPYRIGHT: (C)2008,JPO&INPIT