SEMICONDUCTOR DEVICE AND ITS MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide a highly reliable semiconductor device in which the permeation of water and hydrogen into a capacitor structure is prevented as much as possible, and influence on a dielectric behavior, variation in contact resistance, and the like are suppressed by forming an interl...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	IZUMI TAKATOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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