SAMPLE SUPPORTING RACK, AND METHOD OF INSPECTING INSPECTION SUBSTANCE WHILE USING THE SAME

PROBLEM TO BE SOLVED: To provide a sample supporting rack holding a sample used for electric contact of an inspection substance for sample tester inspection, and to provide a method of inspecting the inspection substance of the sample tester by the sample supporting rack. SOLUTION: The sample supporting rack includes a sample card holder, a sample card, and a sample card adaptor. The sample card is connected to the sample card adaptor electrically and mutually for connecting to a shield made of an electrically conductive material. The sample card is arranged so that it is positioned at the passing port of the shield. The shield is arranged between the sample card holder and the inspection substance to ensure electric insulation from the sample card holder. For inspecting the inspection substance, the inspection substance to the sample held in such a manner is positioned by angle matching of the contact surface of the inspection substance to a sonde tip and movement of the inspection substance along a path, and the path is started from a first reference position and is composed of X- and Y- components to a first contact position and other contact positions. COPYRIGHT: (C)2008,JPO&INPIT