ULTRASONIC BONDING DEVICE
PROBLEM TO BE SOLVED: To provide an ultrasonic bonding device which is equipped with a cooling means to reduce the amount of heat conducted from a heater to a vibrator, while avoiding adversely affecting the vibration that propagates to a horn. SOLUTION: An ultrasonic bonding device 1 is equipped wi...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide an ultrasonic bonding device which is equipped with a cooling means to reduce the amount of heat conducted from a heater to a vibrator, while avoiding adversely affecting the vibration that propagates to a horn. SOLUTION: An ultrasonic bonding device 1 is equipped with a cooling pipe 3 which serves as a cooling means between heaters 13A, 13B and a vibrator 9 of an ultrasonic mounting tool 60. COPYRIGHT: (C)2008,JPO&INPIT |
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