MANUFACTURING METHOD OF LIGHT-EMITTING DEVICE, AND MANUFACTURING DEVICE OF LIGHT-EMITTING DEVICE
PROBLEM TO BE SOLVED: To provide a manufacturing method of a light-emitting device capable of preventing occurrence of nozzle plugging of a liquid injection head using a low boiling-point solvent, and a manufacturing device of the light-emitting device. SOLUTION: The manufacturing device 100 is a de...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a manufacturing method of a light-emitting device capable of preventing occurrence of nozzle plugging of a liquid injection head using a low boiling-point solvent, and a manufacturing device of the light-emitting device. SOLUTION: The manufacturing device 100 is a device to manufacture a light-emitting device having a pixel electrode, a hole injection layer, a light-emitting layer, and a negative electrode formed on a substrate 10. The manufacturing device 100 comprises a liquid injection head 114 to inject a functional liquid 14L containing a functional substance dissolved or dispersed in a solvent on the substrate 10 on the surface of which the pixel electrode is formed, and a drying device 400 to dry the functional liquid 14L injected on the substrate 10 and form a functional layer containing the functional substance. Here, the function layer includes at least one of the hole injection layer and the light-emitting layer and the liquid injection head 114 is cooled to a temperature so that the vapor pressure of the solvent in the liquid injection head 114 may be 10 mmHg or less. COPYRIGHT: (C)2008,JPO&INPIT |
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