MANUFACTURING METHOD OF PERPENDICULAR MAGNETIC RECORDING MEDIUM AND FILM DEPOSITING DEVICE

PROBLEM TO BE SOLVED: To catch a particle causing a pin hole of a magnetic recording layer without reducing manufacturing efficiency and to reduce a defect due to reduction of magnetic reproducing output caused by the pin hole of the magnetic recording layer in manufacture of a perpendicular magneti...

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Bibliographische Detailangaben
Hauptverfasser:	ONO TOSHINORI, KANAI HIROSHI
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL INFORMATION STORAGE INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORDCARRIER AND TRANSDUCER INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PHYSICS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To catch a particle causing a pin hole of a magnetic recording layer without reducing manufacturing efficiency and to reduce a defect due to reduction of magnetic reproducing output caused by the pin hole of the magnetic recording layer in manufacture of a perpendicular magnetic recording medium. SOLUTION: Particle catching electrodes 16 are provided between a chamber 14 for removing a film of a substrate conveying holder and a substrate loading chamber 2 in a film depositing device. Particle catching electrodes 16 are provided between arbitrary layer depositing chambers between the substrate loading chamber 2 and a Co alloy cap layer depositing chamber 11. The charged particle in the film depositing device is caught by Coulomb force of the particle catching electrodes 16 to which voltage is positively or negatively applied. COPYRIGHT: (C)2008,JPO&INPIT