WAFER HOLDER AND WAFER PROBER INSTALLED WITH THE SAME

PROBLEM TO BE SOLVED: To provide a wafer holder that can improve positional accuracy and temperature uniformity to be improved and the chip to be heated and cooled rapidly by reducing deformation even if a high load is applied thereto, and improving the heat insulation effect, and to provide a wafer...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ITAKURA KATSUHIRO, NISHI TERUHITO, AWAZU TOMOYUKI, NAKADA HIROHIKO, NATSUHARA MASUHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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