PLASMA GENERATING DEVICE AND METHOD, AND MANUFACTURING METHOD OF PLASMA DISPLAY DEVICE USING IT

PROBLEM TO BE SOLVED: To provide a plasma generating device for forming a thin film excellent in uniformity of a film thickness, with restraining standing waves generated by a microwave supply with the use of a given electrode alignment. SOLUTION: Each one end of two I-shape electrode rods is couple...

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Bibliographische Detailangaben
Hauptverfasser:	LEE SEIKEI, KOU TOSHIYOU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY PLASMA TECHNIQUE PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OFNEUTRONS PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMICBEAMS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a plasma generating device for forming a thin film excellent in uniformity of a film thickness, with restraining standing waves generated by a microwave supply with the use of a given electrode alignment. SOLUTION: Each one end of two I-shape electrode rods is coupled to each other with a coupling rod, and an electrode member of a comb shape formed with a power feed point for uniformly supplying power to the electrode rod at the coupling rod is provided. A plurality of the electrode members are provided, and one of the electrode members adjoining to another electrode member is aligned toward a different direction of a power feed point each other so as to be crossed. The other end of the electrode rod includes an electrical opening structure or a grounding structure. And also, power is uniformly made to be supplied through the power feed point to two electrode member groups aligned in different directions with separation in terms of time. COPYRIGHT: (C)2008,JPO&INPIT