OPTICAL DEVICE, MANUFACTURING METHOD OF OPTICAL DEVICE, AND ELECTRONIC APPARATUS

PROBLEM TO BE SOLVED: To provide an optical device in which a leakage and dispersion of a liquid material which is filled in a through hole. SOLUTION: On a substrate 10, there is formed a barrier rib layer 13 dividing pixel apertures 50R, 50G, 50B. Then, on a surface of the barrier rib layer 13, the...

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Hauptverfasser: HANAOKA HIDETAKA, KITABAYASHI ATSUSHI, HAYASHI KANJI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide an optical device in which a leakage and dispersion of a liquid material which is filled in a through hole. SOLUTION: On a substrate 10, there is formed a barrier rib layer 13 dividing pixel apertures 50R, 50G, 50B. Then, on a surface of the barrier rib layer 13, there is formed an inorganic layer 14r covering a region 13r of the barrier rib layer 13 and is formed an inorganic layer 14g as well which is an inorganic layer of thinner thickness than the inorganic layer 14r and covers a region 13g of the barrier rib layer 13. Then, the inorganic layers 14r, 14g are removed by making a fluorine plasm treatment of the substrate 10 where the barrier rib layer 13 and the inorganic layers 14r, 14g, and the regions 13r, 13g, 13b are made water-repellent. The water-repellency of each of the regions 13r, 13g, 13b is made different depending on an existence of the inorganic layer and a difference of thicknesses of the layers. COPYRIGHT: (C)2008,JPO&INPIT