APPARATUS FOR APPLYING PATTERNING FILM AND VACUUM DEPOSITION APPARATUS

PROBLEM TO BE SOLVED: To manufacture a plate for forming an oil film by using a rigid material and to constitute the whole of an apparatus for applying patterning films with a rigid material so as to enhance the durability and to continuously form various oil masking patterns stably. SOLUTION: The a...

Ausführliche Beschreibung

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	SUEMITSU TOSHIYUKI, NAKATANI SHUHEI, MORIYAMA JUN, OKAMOTO TADASHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CAPACITORS CAPACITORS, RECTIFIERS, DETECTORS, SWITCHING DEVICES ORLIGHT-SENSITIVE DEVICES, OF THE ELECTROLYTIC TYPE CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To manufacture a plate for forming an oil film by using a rigid material and to constitute the whole of an apparatus for applying patterning films with a rigid material so as to enhance the durability and to continuously form various oil masking patterns stably. SOLUTION: The apparatus for applying patterning films is equipped with: an inner pipe 2 having an opening part 6 for passing oil vaporized for forming a patterning film in the inner pipe 2; an outer pipe frame 10 which is provided to cover the outer periphery of the inner pipe 2 and in which opening parts 7 are provided; and rigid nozzle plates 4 which are provided so as to be each superposed with respective opening parts 7 of the outer pipe frame 10 and each have a through-hole group 9 comprising a plurality of through-holes 5 for spraying vaporized oil. The shape or alignment pattern of the through-holes 5 constituting the through-hole group 9 is made different in each rigid nozzle plate 4. COPYRIGHT: (C)2008,JPO&INPIT