LASER BEAM MACHINING APPARATUS

PROBLEM TO BE SOLVED: To provide a laser beam machining apparatus capable of easily and correctly performing the calibration of the position of application of machining laser beams. SOLUTION: The laser beam machining apparatus 1 comprises an X-Y stage device 2, a stage 21 movable on the X-Y stage device 2 with a workpiece 3 being fixed thereto, and an objective optical device 4 for condensing and applying the machining laser beams to the workpiece 3. A reference substrate 6 having a two-dimensional reference shape indicating the coordinate system of the X-Y stage thereon is set to the stage 21. The X-Y stage device 2 is moved to the pre-input coordinate position while the reference substrate 6 being set, the reference substrate 6 is moved, and the actually moving coordinate value is read from the two-dimensional reference shape on the moving reference substrate 6. The difference as an error is obtained from the input coordinate value and the measured coordinate value, and the calibration of the X-Y stage device 2 is performed by using the difference. COPYRIGHT: (C)2008,JPO&INPIT