COATER, COATING APPARATUS AND METHOD, AND APPARATUS AND METHOD OF MANUFACTURING MEMBER FOR DISPLAY
PROBLEM TO BE SOLVED: To provide a coater, a coating apparatus and a coating method by which a high grade coating film is formed with a short cycle time and high productivity by providing a means for efficiently discharging air mixed in the inside of the coater with a small quantity of a liquid to b...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a coater, a coating apparatus and a coating method by which a high grade coating film is formed with a short cycle time and high productivity by providing a means for efficiently discharging air mixed in the inside of the coater with a small quantity of a liquid to be fed and in a short period of time, and to provide the apparatus and the method of manufacturing a member for a display using the same. SOLUTION: In the coater having a supply port for supplying the coating liquid to the coater, a manifold for extending the coating liquid in the coating width direction, a spraying port extended in the coating width direction to discharge the coating liquid, a slot communicating the manifold with the spraying port and a liquid discharge port for discharging the coating liquid and the air mixed in the manifold, the cross-sectional area of the manifold in a direction orthogonal to the coating width direction is decreased toward the liquid discharge port provided to both end parts of the manifold from the supply port and the upper end of the manifold is parallel to the spraying port plane or is inclined upward toward the liquid discharge port from the supply port with a spraying port plane as reference. COPYRIGHT: (C)2008,JPO&INPIT |
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