PROJECTION EXPOSURE DEVICE

PROBLEM TO BE SOLVED: To provide a projection exposure device capable of partitioning an exposing exposure region with an excellent response and with a high accuracy. SOLUTION: The projection exposure device 11 has a mercury lamp 13 generating an illuminating light 31 required for an exposure to for...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	TAKAGI TOSHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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