TOOL AND METHOD FOR ADJUSTING POSITION, AND METHOD OF MANUFACTURING ELECTRONIC EQUIPMENT

PROBLEM TO BE SOLVED: To provide a position adjustment tool capable of adjusting the position of a carrier machine precisely and quickly. SOLUTION: The position adjustment tool 1 is used when a carrier container storing a substrate is suspended by the carrier machine for moving onto the load port of...

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Bibliographische Detailangaben
1. Verfasser:	YASUTAKE TSUNEKAZU
Format:	Patent
Sprache:	eng
Schlagworte:	ACCESSORIES, CLOSURES, OR FITTINGS THEREFOR BASIC ELECTRIC ELEMENTS CONTAINERS FOR STORAGE OR TRANSPORT OF ARTICLES OR MATERIALS,e.g. BAGS, BARRELS, BOTTLES, BOXES, CANS, CARTONS, CRATES,DRUMS, JARS, TANKS, HOPPERS, FORWARDING CONTAINERS CONVEYING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY HANDLING THIN OR FILAMENTARY MATERIAL PACKAGES PACKAGING ELEMENTS PACKING PERFORMING OPERATIONS SEMICONDUCTOR DEVICES STORING TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a position adjustment tool capable of adjusting the position of a carrier machine precisely and quickly. SOLUTION: The position adjustment tool 1 is used when a carrier container storing a substrate is suspended by the carrier machine for moving onto the load port of aimed manufacturing equipment and the position is adjusted so that a connection groove provided at the bottom of the carrier container is connected to a kinematic pin on the load port. The position adjustment tool 1 has: a flange 14 provided corresponding to a top flange on the carrier container and retained by the carrier machine; a body 16 connected to the flange 14; and a base plate 10 that is connected to the body, and has a through hole provided at a position corresponding to the kinematic pin with a surface corresponding to the bottom of the carrier container as a rear. The diameter of the through hole 12 is larger than that of the kinematic pin. COPYRIGHT: (C)2008,JPO&INPIT