MEASURING METHOD AND INSPECTING DEVICE FOR SEMICONDUCTOR DEVICE

PROBLEM TO BE SOLVED: To permit measuring the value of electric characteristics stably and correctly even when a temperature in a room in which an inspecting device is installed or an ambient temperature as well as a jig temperature in the device is changed. SOLUTION: The measuring unit 13 with the semiconductor device 12 mounted thereon, a computer unit 14 and a temperature sensor 15 which is a temperature detecting means for detecting the ambient temperature in the vicinity of the measuring unit 13 are installed on the inspecting device 11 while the computer device 14 is provided with a driving means 16 for driving the semiconductor device 12 by supplying current thereto, a characteristics measuring means 17 for measuring the electric characteristics of the driven semiconductor device 12, an operating means or a correcting means 18 for effecting the correcting operation of the electric characteristics value measured by a preset operating method based on the temperature detected by the temperature sensor 15 and a judging means 19 for judging whether the electric characteristics value corrected by the correcting means 18 is good or faulty with respect to the judgement reference. COPYRIGHT: (C)2008,JPO&INPIT