CHARGED PARTICLE BEAM DEVICE AND ITS IMAGE CONTROL METHOD

PROBLEM TO BE SOLVED: To provide a charged particle beam device capable of automatically adjusting to a proper value rapidly even if contrast and brightness of an observation image change, and its control method. SOLUTION: The charged particle beam device which obtains an observation image by irradi...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	KABASAWA TAKANORI, MADOKORO YUICHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
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