CHARGED PARTICLE BEAM DEVICE AND ITS IMAGE CONTROL METHOD

PROBLEM TO BE SOLVED: To provide a charged particle beam device capable of automatically adjusting to a proper value rapidly even if contrast and brightness of an observation image change, and its control method. SOLUTION: The charged particle beam device which obtains an observation image by irradiating charged particle beams on a test piece 6 comprises a control power supply 14 to establish a detector parameter P to adjust amplification rate at the time of making an electrical signal of secondary electron by a secondary electron detector 11, a memory part 20 which stores correlation of the proper value of the detector parameter P and inclination angles θ of the test piece stage 7, and a correction operation part 19 which corrects the value of the detector parameter P according to the inclination angles θ of the test piece stage 7 based on the correlation stored in the memory part 20 and outputs to the control power supply 14 at the time of inclination of the test piece stage 7. COPYRIGHT: (C)2008,JPO&INPIT