SILICON CARBIDE NANOSTRUCTURE AND ITS PRODUCING METHOD

PROBLEM TO BE SOLVED: To provide a silicon carbide nanostructure having a combined shape and a method for producing the silicon carbide nanostructure. SOLUTION: The silicon carbide nanostructure has plate-like crystals consisting of silicon carbide grown epitaxially and perpendicularly to the side f...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SHEN GUOZHEN, BANDO YOSHIO, DEMITRY GOLBERG
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMISTRY COMPOUNDS THEREOF INORGANIC CHEMISTRY MANUFACTURE OR TREATMENT THEREOF METALLURGY NANOSTRUCTURES FORMED BY MANIPULATION OF INDIVIDUAL ATOMS,MOLECULES, OR LIMITED COLLECTIONS OF ATOMS OR MOLECULES ASDISCRETE UNITS NANOTECHNOLOGY NON-METALLIC ELEMENTS PERFORMING OPERATIONS TRANSPORTING
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