SEMICONDUCTOR ELEMENT PROVIDED WITH BULB-TYPE RECESSED CHANNEL, AND ITS MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide a semiconductor element provided with a bulb-type recessed channel which can prevent growth and move of a void produced inside a ball pattern when a conductive film used as a gate electrode is formed, and to provide its manufacturing method. SOLUTION: The method for...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	SUNG MIN-GYU, CHO KOZAI, KO KEN, YANA KOUZEN, LIM KWAN-YONG, KIN TAIJUN, JANG SE AUG, PYI SEUNG HO, LEE SEUNG-RYONG, KIM YONG-SOO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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