SUPPORT FIXTURE OF CHIP PRODUCT
PROBLEM TO BE SOLVED: To provide a support fixture which makes it possible to easily process or inspect small chip products such as a magnetic head slider utilizing existing production equipment for processing a work piece formed in a shape of a wafer. SOLUTION: The support fixture is characterized...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To provide a support fixture which makes it possible to easily process or inspect small chip products such as a magnetic head slider utilizing existing production equipment for processing a work piece formed in a shape of a wafer. SOLUTION: The support fixture is characterized by having: a board 10 formed in a plate body; a slide plate 20 which moves between a position where a body to be inspected is engaged between an inside face 13a of the set concave portion 13 and a position retreated from the engaged position inside of the set concave portion 13 prepared in one face of the board 10; and a holding means 30 to hold the slide plate 20 at a position where the above body to be inspected is engaged. COPYRIGHT: (C)2008,JPO&INPIT |
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