PIEZOELECTRIC ELEMENT AND LIQUID DISCHARGE HEAD

PROBLEM TO BE SOLVED: To provide a manufacturing method of a piezoelectric element which can acquire good target crystallinity and also can improve the in-plane uniformity of piezoelectric characteristics, and to provide the piezoelectric element which is improved in the uniformity. SOLUTION: Lamination is formed by carrying out two or more times a formation process of a piezoelectric layer (S6) comprising: a process for applying a sol 411" of an organometallic compound (S3); a process for making the sol of the organometallic compound gel by carrying out a process for making the sol of the organometallic compound dry and for degreasing this (S4); and a process for crystallizing this gelled organometallic compound 411' (S5). In the process for degreasing the compound, a temperature rise rate at the first-time degreasing is set to 500°C/min or less for heating. COPYRIGHT: (C)2008,JPO&INPIT