METHOD FOR MAKING PHOTOMASK

PROBLEM TO BE SOLVED: To provide a method for making a photomask necessary for manufacturing a semiconductor device, avoiding a risk of a short circuit or the like in a dummy region among elements, circuits or wells. SOLUTION: The method for making a photomask includes, as one embodiment of the pres...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: IGARASHI MOTOSHIGE
Format: Patent
Sprache:eng
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