LITHOGRAPHIC APPARATUS HAVING MECHANISM PROVIDING GAS BEARING, AND METHOD OF MANUFACTURING DEVICE

PROBLEM TO BE SOLVED: To provide a lithographic apparatus whose movable object component can be guided with a gas bearing, to which pressurized gas is supplied by using an improved gas supply mechanism. SOLUTION: The lithographic apparatus which has a track prepared with a plurality of gas flow ejec...

Ausführliche Beschreibung

Bibliographische Detailangaben

1. Verfasser:	JACOBS HERNES
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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