LITHOGRAPHIC APPARATUS HAVING MECHANISM PROVIDING GAS BEARING, AND METHOD OF MANUFACTURING DEVICE

PROBLEM TO BE SOLVED: To provide a lithographic apparatus whose movable object component can be guided with a gas bearing, to which pressurized gas is supplied by using an improved gas supply mechanism. SOLUTION: The lithographic apparatus which has a track prepared with a plurality of gas flow ejec...

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Bibliographische Detailangaben
1. Verfasser:	JACOBS HERNES
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a lithographic apparatus whose movable object component can be guided with a gas bearing, to which pressurized gas is supplied by using an improved gas supply mechanism. SOLUTION: The lithographic apparatus which has a track prepared with a plurality of gas flow ejection holes arranged along the track is disclosed. Gas conduits are constituted so that they supply the pressurized gas to the gas flow ejection holes in order to form the gas bearing constituted for supporting the object component movably along the track. Furthermore, a gas flow device is formed that is constituted for generating gas flows which pass through one or more gas flow ejection holes on a guide surface of the object component, or for impeding gas flows which pass through one or more gas flow ejection holes, corresponding to the positional relations between the gas flow ejection holes and positions on the guide surface. COPYRIGHT: (C)2008,JPO&INPIT