FILM FORMING DEVICE

PROBLEM TO BE SOLVED: To provide a film forming device capable of forming alignment films, having desired quality without having to subject it to rubbing processing. SOLUTION: The film forming device comprises a first processing device which heats a solid body of an organic material for forming the...

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Bibliographische Detailangaben
1. Verfasser:	SOGO TOMOHIKO
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING DIFFUSION TREATMENT OF METALLIC MATERIAL FREQUENCY-CHANGING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a film forming device capable of forming alignment films, having desired quality without having to subject it to rubbing processing. SOLUTION: The film forming device comprises a first processing device which heats a solid body of an organic material for forming the alignment film at first temperature, to produce a liquid body of the organic material and a second processing device which heats the liquid body produced by the first processing device at second temperature higher than the first temperature to produce vapor of the organic material, and supplies the vapor of the organic material produced by the second processing device, to a substrate to form an alignment film of the organic material on the substrate. COPYRIGHT: (C)2008,JPO&INPIT