DRILLING METHOD AND LASER BEAM MACHINE

PROBLEM TO BE SOLVED: To provide a drilling method and a laser beam machine which shortens a time for measuring a height of a surface of a workpiece even if unevenness of 10-30 μm exists on a surface of a table and improves machining efficiency. SOLUTION: A height of a surface of an X-Y table 6 on which a workpiece 20 is mounted is measured in a grid beforehand. The height Hst of an arbitrary point Pst (xs, yt) on the upper surface of the workpiece 20 mounted on the X-Y table 6 is measured before machining, heights of four points surrounding the point Pst are used to obtain a surface height hst of the point Pst by computation, and a difference between the measured height Hst and the height hst obtained by the computation is specified as a thickness T of the workpiece 20. A height Hef on the upper surface of the workpiece 20 on another machining position Pef (xe, yf) is specified to be a total of a height hef at the position calculated from the height of the table surface measured in matrix, and of the thickness T to define a laser focusing position. COPYRIGHT: (C)2008,JPO&INPIT