FILM-FORMING DEVICE

PROBLEM TO BE SOLVED: To provide a film forming device where occurrence of foreign matters is controlled at the time of forming an orientation film on a substrate and the orientation film can sufficiently be formed. SOLUTION: A film forming device is provided with a first room which stores the subst...

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Bibliographische Detailangaben
1. Verfasser:	NAKADA HIDEO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DEVICES OR ARRANGEMENTS, THE OPTICAL OPERATION OF WHICH ISMODIFIED BY CHANGING THE OPTICAL PROPERTIES OF THE MEDIUM OF THEDEVICES OR ARRANGEMENTS FOR THE CONTROL OF THE INTENSITY,COLOUR, PHASE, POLARISATION OR DIRECTION OF LIGHT, e.g.SWITCHING, GATING, MODULATING OR DEMODULATING DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY FREQUENCY-CHANGING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY NON-LINEAR OPTICS OPTICAL ANALOGUE/DIGITAL CONVERTERS OPTICAL LOGIC ELEMENTS OPTICS PHYSICS SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TECHNIQUES OR PROCEDURES FOR THE OPERATION THEREOF
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a film forming device where occurrence of foreign matters is controlled at the time of forming an orientation film on a substrate and the orientation film can sufficiently be formed. SOLUTION: A film forming device is provided with a first room which stores the substrate and in which an orientation film can be formed on the stored substrate, a material supply part which is disposed in the first room and can supply a material for forming the orientation film on the substrate, a holding device which is arranged in the first room and attachably/detachably holds a prescribed member so that the prescribed member is disposed between the material and the substrate, a cleaning system which is installed in a position apart from the first room and can clean the prescribed member and a transportation system for transporting the prescribed member between the holding device of the first room and the cleaning system. COPYRIGHT: (C)2008,JPO&INPIT