INTERFERENCE MEASURING INSTRUMENT

PROBLEM TO BE SOLVED: To improve processing cycle time for measurement by suppressing temperature deterioration of an object to be measured due to adiabatic expansion of air generated when decompressing a vacuum chamber. SOLUTION: An interference measuring instrument is provided with flow passages 1...

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Bibliographische Detailangaben
1. Verfasser:	IIJIMA HITOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ANGLES MEASURING AREAS MEASURING IRREGULARITIES OF SURFACES OR CONTOURS MEASURING LENGTH, THICKNESS OR SIMILAR LINEARDIMENSIONS PHYSICS SEMICONDUCTOR DEVICES TESTING
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Zusammenfassung:	PROBLEM TO BE SOLVED: To improve processing cycle time for measurement by suppressing temperature deterioration of an object to be measured due to adiabatic expansion of air generated when decompressing a vacuum chamber. SOLUTION: An interference measuring instrument is provided with flow passages 110 and 111 for fluidizing temperature regulation water on stages 105 and 106 mounting the object to be measured W1and a TS lens 107 in the vacuum chamber 113. The interference measuring instrument supplies the temperature regulation water to the flow passages 110 and 111 by a process for decompressing the vacuum chamber 113 with a vacuum pump 117, and suppresses the temperature deterioration of the object to be measured W1and the TS lens 107 by controlling the temperature of the stages 105 and 106. Therefore measurement is enabled at high processing cycle time in highly accurate measurement in a decompression state. COPYRIGHT: (C)2008,JPO&INPIT