SLIDING MEMBER FOR VACUUM

PROBLEM TO BE SOLVED: To provide a sliding member having low friction and high durability in vacuum, in atmosphere or in the both condition to be used in the space and a vacuum system. SOLUTION: The surface of diamond or a diamond film being the first sliding member is ground so that its surface rou...

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Bibliographische Detailangaben
Hauptverfasser: TAKANO SHIGETO, MOTO AKIO, KANDA KAZUTAKA, GOTO KENICHI
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To provide a sliding member having low friction and high durability in vacuum, in atmosphere or in the both condition to be used in the space and a vacuum system. SOLUTION: The surface of diamond or a diamond film being the first sliding member is ground so that its surface roughness is ≤0.5 μm in the arithmetic average roughness Ra. On the outermost surface of the second sliding member being an opponent member to be slid, an alloy or plating containing, by weight, 4 to 96% Ni, or an alloy or plating comprising 5 to 65% Ni and 15 to 55% Cr is formed. Thus the sliding member for vacuum is formed of the first and second sliding members. COPYRIGHT: (C)2008,JPO&INPIT