VAPORIZER, FILTERING APPARATUS, FILM FORMING DEVICE AND VAPORIZATION METHOD

PROBLEM TO BE SOLVED: To provide a vaporizer which is capable of performing stable vaporization for a long time by improving re-vaporization efficiency of mist captured in a filter. SOLUTION: A vaporizer comprises a feeding port which is provided in a vaporization chamber forming member, for feeding...

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Bibliographische Detailangaben
Hauptverfasser:	OKURA NARIYUKI, OKABE YASUYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL METALLURGY SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a vaporizer which is capable of performing stable vaporization for a long time by improving re-vaporization efficiency of mist captured in a filter. SOLUTION: A vaporizer comprises a feeding port which is provided in a vaporization chamber forming member, for feeding gases obtained by vaporizing a liquid material to a consumption device; a filter which is provided to cover the feeding port, for capturing a non-vaporized liquid material; and an infrared ray radiation unit, for irradiating the filter with infrared rays. By heating the filter with infrared radiation heat, vaporization efficiency of the non-vaporized liquid material captured by the filter is improved, filter clogging is suppressed, and a service life of the filter is prolonged. COPYRIGHT: (C)2008,JPO&INPIT