POSITIONING DEVICE, STAGE, AND DEVICE FOR INSPECTING OR PROCESSING

PROBLEM TO BE SOLVED: To provide a positioning device that does not rub off a sample not to scatter a dust even the sample is flattened and sucked with the circumference surface of the sample pressed and with the sample held to the predetermined position in order to keep the plate-like sample sucked...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	MORISHIGE YOSHIO, SUGITA KAZUO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a positioning device that does not rub off a sample not to scatter a dust even the sample is flattened and sucked with the circumference surface of the sample pressed and with the sample held to the predetermined position in order to keep the plate-like sample sucked to the predetermined position of the sample support. SOLUTION: The positioning device has an orientation flat adjusting arm 81 and a centering arm 82 comprising a traveling mechanism 13 that travels together with the circumference part parallel in a direction of the normal line of the surface of the sample support 9 with the circumference part of the sample 7 pressed to the sample support 9 from a number of directions in parallel with the surface of the sample support 9, in order to hold the sample 7 to the predetermined position. COPYRIGHT: (C)2008,JPO&INPIT