HEAT TREATMENT METHOD FOR ZINC OXIDE-BASED TRANSPARENT CONDUCTIVE FILM

PROBLEM TO BE SOLVED: To provide a heat treatment method, which dispenses with special formation of a thin film having satisfactory crystallinity, and never causes increase in resistivity even in a heat treatment process at a temperature exceeding 150°C after thin film formation. SOLUTION: In the he...

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Hauptverfasser:	IIGUSA HITOSHI, UCHIUMI KENTARO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CABLES CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CONDUCTORS DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INSULATORS METALLURGY SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING ORDIELECTRIC PROPERTIES SEMICONDUCTOR DEVICES SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a heat treatment method, which dispenses with special formation of a thin film having satisfactory crystallinity, and never causes increase in resistivity even in a heat treatment process at a temperature exceeding 150°C after thin film formation. SOLUTION: In the heat treatment method for zinc oxide-based transparent conductive film for heat treating a zinc oxide-based transparent conductive film including zinc oxide and an additive at a temperature of 150°C or higher, the heat treatment is performed in a non-oxidizing atmosphere, and the resulting oxide zinc-based transparent conductive film is taken out to the atmosphere after the temperature thereof becomes 150°C or lower. COPYRIGHT: (C)2008,JPO&INPIT