ION BEAM SOURCE DEVICE

PROBLEM TO BE SOLVED: To eliminate problems that in an ion beam source device, when a space charge is formed by extracted ions and an extracted current density becomes large, a proportionally large electric field is generated, and as a result, an ion beam is self-divergent. SOLUTION: In the ion beam...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OGUCHI HARUHISA, SAKAKIDA SO, HIRANO YOICHI, KIYAMA MANABU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS ELECTRICITY
Online-Zugang:	Volltext bestellen
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