ION BEAM SOURCE DEVICE
PROBLEM TO BE SOLVED: To eliminate problems that in an ion beam source device, when a space charge is formed by extracted ions and an extracted current density becomes large, a proportionally large electric field is generated, and as a result, an ion beam is self-divergent. SOLUTION: In the ion beam...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To eliminate problems that in an ion beam source device, when a space charge is formed by extracted ions and an extracted current density becomes large, a proportionally large electric field is generated, and as a result, an ion beam is self-divergent. SOLUTION: In the ion beam source device in which the ions are extracted from a plasma source by using an electrode having a mesh structure or one or numerous holes, this is the ion beam source device in which by irradiating light or X-ray from a beam extraction direction opposed to the plasma source, photoelectrons are emitted from the irradiated electrode rear face, in which the space charge of the ions extracted from the electrode holes is neutralized, and in which divergence of the ion beam is suppressed. COPYRIGHT: (C)2008,JPO&INPIT |
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