SURFACE INSPECTING DEVICE

SURFACE INSPECTING DEVICE

PROBLEM TO BE SOLVED: To provide a surface inspecting device capable of reducing noise light, in response to changes in the inspection conditions, using space-saving members. SOLUTION: This device comprises a lighting part 13 for illuminating an inspection object 11, and an observation part 14 for o...

Ausführliche Beschreibung

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Bibliographische Detailangaben
1. Verfasser: SATO TATSUMI
Format: Patent
Sprache:eng
Schlagworte:
INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES
MEASURING
PHYSICS
TESTING
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To provide a surface inspecting device capable of reducing noise light, in response to changes in the inspection conditions, using space-saving members. SOLUTION: This device comprises a lighting part 13 for illuminating an inspection object 11, and an observation part 14 for observing the inspection object illuminated by the lighting part. Diaphragms 24, 28 are arranged in a light passage from the lighting part, going toward the observation part. The diaphragms can change the shape of an opening, by changing the relative positions of multiply divided shading members. COPYRIGHT: (C)2008,JPO&INPIT