HYDRODYNAMIC BEARING AND ITS MANUFACTURING METHOD

PROBLEM TO BE SOLVED: To provide a hydrodynamic bearing using a photo-lithography having excellent wear resistance which is capable of improving the difficulty in working a very small groove in an inner hole wall of the hydrodynamic bearing, and its manufacturing method. SOLUTION: The manufacturing...

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Hauptverfasser:	LEE CHENGANG, SHING TAI-KANG, CHIN KOKON, CHANG HENGUNG, YUAN ZONG-TING
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS THEREFOR BEARINGS BLASTING CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTROFORMING ELECTROLYTIC OR ELECTROPHORETIC PROCESSES ELEMENTS OR CRANKSHAFT MECHANISMS ENGINEERING ELEMENTS AND UNITS FLEXIBLE SHAFTS GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVEFUNCTIONING OF MACHINES OR INSTALLATIONS HEATING INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL LIGHTING MECHANICAL ENGINEERING METALLURGY PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTIONOF COATINGS ROTARY BODIES OTHER THAN GEARING ELEMENTS SHAFTS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION THERMAL INSULATION IN GENERAL WEAPONS
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a hydrodynamic bearing using a photo-lithography having excellent wear resistance which is capable of improving the difficulty in working a very small groove in an inner hole wall of the hydrodynamic bearing, and its manufacturing method. SOLUTION: The manufacturing method of the hydrodynamic bearing includes a step of providing a bearing body 1 having an inner hole, a step of coating a photo resist on a surface of an inner hole wall of the bearing body 1, a step of performing the exposure by installing a lamp having a mask of a hydrodynamic groove pattern on its surface with the photo resist exposed thereon in the inner hole of the bearing body, a step of performing the development of the photo resist, and removing a part of the photo resist to expose the inner hole wall, a step of forming a deposition layer 50 on the inner hole wall which is not protected by the photo resist, and a step of removing the photo resist remaining on the inner hole wall to form the hydrodynamic groove 12 on the inner hole wall. COPYRIGHT: (C)2008,JPO&INPIT