AUXILIARY DEVICE OF WAFER CASSETTE

PROBLEM TO BE SOLVED: To provide an auxiliary device of a wafer cassette capable of making wafers free from touching, friction and injury when wafer frames are taken out of, or set into a wafer cassette. SOLUTION: The auxiliary device of a wafer cassette includes a guide rail frame 207, which includ...

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Bibliographische Detailangaben
Hauptverfasser:	SU SHUNKETSU, RA SHIJIN, CHIN SHUI, TAI HEKIKI, SHO BUNKOKU
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide an auxiliary device of a wafer cassette capable of making wafers free from touching, friction and injury when wafer frames are taken out of, or set into a wafer cassette. SOLUTION: The auxiliary device of a wafer cassette includes a guide rail frame 207, which includes a first guide rail tank plate 202, a second guide rail tank plate 203 and at least one articulating arm 205. In the guide rail frame 207, the first guide rail tank plate 202 and the second guide rail tank plate 203 are joined through each articulating arm 205 at their side edges. In addition, the first guide rail tank plate 202 and the second guide rail tank plate 203 are each provided with guide rail tanks 204 in the positions each corresponding to the position of each of wafer cassette slots of the wafer cassette. Further, each guide rail tank 204 has a shape such that end portions of the tank 204 each have a width gradually narrowed toward the middle of the guide rail tank 204 to allow the guide rail frame 207 to be connected to the wafer cassette. COPYRIGHT: (C)2008,JPO&INPIT