POSITIONING STAGE AND TRANSFER SYSTEM

PROBLEM TO BE SOLVED: To implement a transfer system which makes up for a shortage of a transfer stroke by a transfer beam by a supplementary transfer means. SOLUTION: There is provided a positioning stage which is set up by arranging a pair of X axial linear motors for moving sliders in an X axial direction in parallel with each other, and arranging a Y axial linear motor on a bridge member bridging a gap between the sliders of the pairing X axial linear motors, and then on the positioning stage thus set up, a workpiece as a machining object mounted on a suction pad is subjected to predetermined processing by using a tool mounted on the slider of the Y axial linear motor. The positioning stage is composed of: a pair of transfer slider members movable in the X axial direction along the pairing X axial linear motor; a transfer bridge member bridging a gap between the transfer slider members; and an arm member mounted on the transfer bridge member to support a lower surface of the workpiece, and extending in the X axial direction. The positioning stage is further composed of: a workpiece transfer means for supporting the workpiece, moving in the X axial direction, and delivering the workpiece to the outside of the stage; and the supplementary transfer means for making up for a shortage of the transfer stroke of the arm member to transfer the workpiece. COPYRIGHT: (C)2008,JPO&INPIT