APPARATUS FOR PROCESSING SUBSTRATE

PROBLEM TO BE SOLVED: To provide an apparatus for processing a substrate, in which the substrate is prevented from floating from a supporting roller for supporting the back surface of the substrate when the substrate to be inclined at a predetermined angle and conveyed is dried. SOLUTION: The appara...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
1. Verfasser: HIROSE HARUMICHI
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!