WORKING INSTRUMENT AND CONTROL METHOD OF WORKING INSTRUMENT

PROBLEM TO BE SOLVED: To provide a working instrument equipped with a numerical control device and at least two numerically controlled movement axes to achieve super high precision working of l μm or less. SOLUTION: The working instrument 1 equipped with the numerical control device 3 and at least t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: KATO KAZUTO, KAMEYAMA MICHIO, FUKAYA TERUKAZU
Format: Patent
Sprache:eng
Schlagworte:
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